Abstract
X-ray reflection is a well-known method for structural studies of multilayers. By measuring the specular reflectivity, the thicknesses, electron densities and interface roughness can be determined. On the other hand, the off-specular or diffuse scattering carries information about the lateral morphology and roughness of the interface. In particular, correlations of the interface roughness give rise to Resonant Diffuse Scattering (RDS). In this paper, we will show that RDS can be combined with the anomalous effect in order to obtain interfacial chemical information. Additionally we describe an experimental procedure that allows us to record anomalous RDS spectra exhibiting fine structures analogous to those observed in the well-known DAFS spectroscopy. Diffraction from Ni/Mo multilayers grown by ion beam sputtering are used to illustrate the method.
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