Abstract
The substrate heating system was applied to the high-speed pulsed laser deposition (PLD) method and it was clarified that anisotropic Nd–Fe–B thick film magnets can be obtained under the high deposition rate of larger than 20 μm/h. The obtained coercivity ( H CJ), remanence ( B r) and ( BH) max of an anisotropic film magnets were approximately 500 kA/m, 0.75 T and 75 kJ/m 3, respectively. The values of remanence and ( BH) max were improved compared with those for the isotropic PLD-made thick films.
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