Abstract
The interceptive deposition method (IDM) was applied to the high-speed pulsed laser deposition (PLD) method with a substrate heating system, and it was clarified that anisotropic Nd-Fe-B thick-film magnets can be obtained under a high deposition rate larger than 20–50μm∕h. The obtained coercivity, remanence, and (BH)max values of a film were 577kA∕m, 0.90T, and 118kJ∕m3, respectively. In addition, we succeeded in increasing the thickness up to 90μm for an anisotropic Nd-Fe-B film magnet by using IDM.
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