Abstract
Angular distributions of high energy neutrals and ions, impinging on an RF-biased electrode in a 13.56 MHz capacitively-coupled argon plasma were investigated. Ions and neutrals were introduced into a drift chamber that was directly connected to the RF electrode. A two-dimensional beam image was measured by a micro-channel plate. Neutral and ion beams were separated by an electrostatic deflector in the drift chamber. Angular distribution widths for ion and neutral were less than 1° at self-bias voltages above 300 V and monotonically decreased with increasing the self-bias voltage. Neutral angular distribution width was larger than that of ion, irrespective of self-bias voltage.
Published Version
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