Abstract
The angular dependence of dynamic magnetic properties of FeTaN thin films fabricated by rf sputtering deposition technique onto various substrates was investigated in conjunction with static magnetic characteristics. Thin films grown onto rigid and thick substrates show a well-defined uniaxial anisotropy and strongly distinct permeability spectra measured at various orientations while those samples grown onto flexible and thin substrates exhibit a less well-defined uniaxial anisotropy and much less different permeability spectra. The resultant variation of the magnetization orientation distributions obtained by retrieving the magnetization values from the permeability curves for different substrates can be interpreted in terms of the magnetic anisotropy dispersion due to stress.
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