Abstract
Electron scattering and diffraction in X-ray photoelectron Spectroscopy (XPS) are used to characterize GaAs(001) chemically etched surfaces. Ga2 p 3 2 Ga3 d, As2 p 3 2 and As3 d photoelectrons and Ga LMM and As LMM Auger electrons are observed as a function of polar angle for the [110] and [110] azimuths. The kinetic energy of these photoelectrons covers the range from 160 to 1440 eV. for such energies, the experimental results are correctly predicted by the single-scattering cluster plane-wave model. We also examine, using simple models, the expected influence of spherical-wave and multiple scattering. The problems of quantitative measurement in XPS are discussed in relation to the diffraction phenomena.
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More From: Journal of Electron Spectroscopy and Related Phenomena
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