Abstract

Titanium dioxide is widely used in a lot of applications. The properties of TiO2 strongly depend on its phase composition. The transformation temperature between phases is influenced by a lot of factors. One of them is a type of substrate under the TiO2 film. In presented work, thin films of TiO2 were deposited by the sol–gel method on silicon, stainless steel (304L) and Co–Cr–Mo alloy (Vitallium). The process of anatase–rutile phase transformation was investigated by Scanning Electron Microscopy (SEM) and X-Ray Diffraction (XRD) studies of deposited coatings. The results were compared with anatase–rutile transformations temperature of TiO2 powders obtained by analogous sol–gel process. The temperature of anatase–rutile phase transformation changed in the range of 700–1000°C and strongly depends on a kind of substrate. It was found that anatase–rutile transformation of TiO2 coating proceeded at a higher temperature than rutilization of titania powders.

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