Abstract
The paper presents analytical modelling and Finite Element Method (FEM) based simulation of clamped circular capacitive pressure sensors for Intraocular Pressure (IOP) measurement. The parallel plate capacitive pressure sensor consists of a fixed backplate and a circular shaped clamped thin diaphragm made of silicon material. The plates are separated by a vacuum media. MATLAB® and COVENTORWARE® are used for analytical and FEM simulations, respectively, and a comparison of maximum deflection in the diaphragm, capacitance after pressure application and sensitivity is carried out. A pressure range of 0-60 mmHg is used for IOP measurement.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IOP Conf. Series: Materials Science and Engineering
Paper Title
Journal
Date
