Abstract

This paper presents an analysis of data on the cross sections of elastic and inelastic collisions of electrons with noble gases, alkali and other atoms. For the selected sets of experimental and theoretical data, optimal analytical formulas are found, and approximation coefficients are calculated. The obtained semi-empirical formulas reproduce the values of the transport (diffusion), excitation and ionization cross sections for noble gases. Much attention is paid to the ionization cross sections of metal atoms, which are often present as an impurity in gas-discharge plasma. The approximation formulas reproduce the values of the ionization cross sections for hydrogen, metal and other elements in a wide range of energies with accurate orders of errors of the available theoretical and experimental data. For some elements with a two-hump plot of the dependence of the ionization cross section on the collision energy, it is proposed to use a two-term formula that takes into account ionization from both external and internal shells.

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