Analytical elimination of substrate backside reflections from reflectance measurements.

Abstract

An analytical approach to eliminate substrate backside reflections from measured reflectance of an unknown optical coating has been deducted. Thereby, measured transmittance, reflectance, and backside reflectance of the coating and transmittance and reflectance of the uncoated substrate at the desired angle of incidence and polarization state are required as input data. In the underlying theory, layer and substrate materials may be absorbing.