Abstract
The objective of this work is to create an analytical framework to study the static pull-in and also equilibrium behavior in electrostatically actuated torsional micromirrors. First the equation governing the static behavior of electrostatic torsion micromirrors is derived and normalized. Perturbation method, the method of straight forward expansion is utilized to find the pull-in angle of the mirror. Comparison of the presented results with numerical ones available in the literature shows that the proposed second order perturbation expansion gives very precise approximations for the pull-in angle of the mirror. Then straightforward perturbation expansion method is used again to analytically simulate the voltage dependent behavior in electrostatic torsion micromirrors. The results are compared with numerical and experimental findings and excellent agreement is observed.
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