Abstract
In this paper, we fabricate a surface acoustic wave (SAW) device with micro-structures on a zinc oxide (ZnO) thin film and measure its signal response. The manufacturing processes of the SAW device include the fabrication of micro-structures of a SAW element and its interdigital transducer by silicon micro-machining and the fabrication of a thin film of ZnO by RF magnetron sputtering. We, then, measure the SAW properties. This research investigates the properties of sputtered thin films for various amounts of O2/(Ar + O2) using Zn and ZnO targets. Regardless of target, the growth rate of the ZnO thin film decreases as the oxygen content increases. When the SAW is sputtered ZnO thin film using 30% oxygen, the digital signal of the SAW has better performance. The measurement signal of the SAW with micro-structures is similar to that without micro-structures.
Highlights
Surface acoustic waves (SAWs) can be employed to determine mass variations by the frequency diversification method
A surface acoustic wave (SAW) device can act as a sensor in many fields
A SAW can act as a gas sensor to detect the concentration of oxygen, or as a biosensor to detect micro-particles of different kinds or contribute to facilitated blood analysis
Summary
Surface acoustic waves (SAWs) can be employed to determine mass variations by the frequency diversification method. A SAW element with 72 pairs of interdigital IDT fingers was fabricated on a (100) silicon wafer by silicon micro-machining. The 20, 30, and 40 μm interdigital IDT fingers structures of a SAW has been manufactured using a negative SU-8 photoresist on silicon micro-machining, which detected the mixed reaction frequency, at various concentrations, between glycerol and wafer [6]. A layered nanostructure (semiconductor + metal) created new possibilities for gas sensing in a SAW sensor with acousto-electric application between the surface wave and the sensor structure [9].
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