Abstract
The free vibrations of a multilayer C-axis inclined zig-zag ZnO thin-film bulk acoustic wave resonator (FBAR) connected to external impedance have been analyzed; the frequency equation and mode shape for this resonator were derived based on the linear piezoelectric theory. The impedance characteristics of the FBAR are derived and compared with previous experimental results. The analytical result shows that as the layer number increases, the thickness shear mode remains stable while the longitudinal mode has shifted to a lower value. Sensitivity analysis has been performed to explain the discrepancy between our analytical result and previous experiment result. The analytical results provide an insight for the multi-layered zig-zag FBAR design and applications.
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