Abstract
In this study, the sensing properties of an amorphous indium gallium zinc oxide (a-IGZO) thin film at ozone concentrations from 500 to 5 ppm were investigated. The a-IGZO thin film showed very good reproducibility and stability over three test cycles. The ozone concentration of 60–70 ppb also showed a good response. The resistance change (ΔR) and sensitivity (S) were linearly dependent on the ozone concentration. The response time (T90-res), recovery time (T90-rec), and time constant (τ) showed first-order exponential decay with increasing ozone concentration. The resistance–time curve shows that the maximum resistance change rate (dRg/dt) is proportional to the ozone concentration during the adsorption. The results also show that it is better to sense rapidly and stably at a low ozone concentration using a high light intensity. The ozone concentration can be derived from the resistance change, sensitivity, response time, time constant (τ), and first derivative function of resistance. However, the time of the first derivative function of resistance is shorter than other parameters. The results show that a-IGZO thin films and the first-order differentiation method are promising candidates for use as ozone sensors for practical applications.
Highlights
Gas sensors are widely used in several environmental and industrial applications
Thin films of Metal oxide semiconductors (MOSs) such as tin oxide and zinc oxide, 2D materials, and graphene are widely used in different gas sensors to detect diverse target materials [1,2,3,4,5,6,7]
We previously reported that the MOS amorphous indium-gallium-zinc oxide (InGaZnO4, amorphous indium gallium zinc oxide (a-IGZO))
Summary
Gas sensors are widely used in several environmental and industrial applications. Good gas sensors should possess several characteristics, including high sensitivity, fast response, low energy consumption, long-term operation capability, and low fabrication cost [1,2,3,4,5,6]. IGZO is used in the display industry, for example, in 4K-resolution low-power IGZO LCD panels [13,14,15,16] It is used in gas sensors for different targets [17,18,19]. Sensors 2018, 18, 163 film sensitivity, response time, time constant, and the rate of resistance change relative to the ozone. In IGZO film sensitivity, response time, time constant, and the rate of resistance change relative to the ozone concentration in the range of 500 ppb–2 ppm were evaluated. Experimental schematics and processes have been reported in our previous study [11,12,20,21]
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