Abstract
It is shown that contribution to the integrated intensity of x-ray anomalous transmission from the elastic and plastic lattice distortions can be separated. The results of the x-ray investigations allows to determine the dislocation density, relative level and sign of the elastic distortion (lattice curvature) along selected crystallographic directions in a GaAs crystal slab. More detailed confirmation of the method for separation of the lattice distortion and dislocations density contributions to the intensity of x-ray Laue diffraction in high-absorption case was made by investigation of x-ray diffraction integrated intensity as a function of crystal thickness.
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