Abstract
Mechanisms of the radiation-induced development of nanostructures in subsurface metal regions have been analyzed based on field-ion microscopy data. It is concluded that the modification of near-surface metal regions on a nanometer scale as a result of the interaction with Ar+ ion beams proceeds by several mechanisms. In particular, for a fluence of F = 1016 ion/cm2 (at an ion energy of E = 30 keV), the main contribution is due to the ion channeling. A tenfold increase in the ion fluence leads to prevailing deformation mechanism in nanostructure formation in the subsurface metal regions.
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