Abstract
Reported substrate-misorientation and growth-temperature dependences of alloy composition in metalorganic vapor-phase epitaxially grown c-plane InGaN were successfully analyzed by applying least-squares regression to relationships derived in the kink segregation model. The analysis gave a reasonable result that the equilibrium indium content at the kink site decreased with growth temperature T due to increased desorption of indium adatoms. The analysis also revealed that the relaxation time for the indium content at the step-edge site (i.e., the length of time before the indium content at the step-edge site reaches its equilibrium value) was reduced with increasing T (i.e., 34 ms at 780 °C and 21 ms at 820 °C). The analysis can be improved by more experimental results for various T and contribute to practical predictions of compositional variation in alloy semiconductors.
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