Abstract
Analysis of oxygen on beryllium can be routinely performed using helium-ion backscattering (RBS). However, determination of the bulk oxygen concentration by this technique is limited to about 350 atomic parts per million (appm). We have performed simultaneous RBS and particle-induced X-ray emission (PIXE) measurements to improve the detection limit for bulk oxygen. The RBS measurements allowed determination of the surface oxygen before and after in situ sputter cleaning by argon ions in an ultra-high-vacuum system. PIXE measurements of specimens with surfaces maintained clean by sputtering permitted assessment of the concentration of oxygen in the bulk. For our geometry and detector sensitivities, 90% of the oxygen X-ray signal originated in the first 2.1 μm of the beryllium and a detection limit of 10 appm was found.
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