Abstract
The characteristics of a capacitively coupled CHF3 plasma driven by dual-frequency sources (41 MHz/2 MHz) are experimentally investigated by using optical emission spectroscopy technique. The dependences of relative densities of F and H, the ratio of F/CF2, and the excitation temperature, as well as neutral gas rotational temperature on the low or high frequency (LF or HF) power, have been analyzed. It is found that the increment rate of the gas dissociation rate, the ratio of F/CF2, the excitation temperature. and the neutral gas temperature with increasing LF power are larger than that of HF power. The relative densities of F and H, the ratio of F/CF2, and the excitation temperature decrease while the neutral gas temperature increases with increasing gas pressure.
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