Abstract
The method of Rutherford backscattering (RBS) of 4He ions is used to detect impurities in the surface region of natural diamond crystals. In order to decrease the influence of luminescence from the surface of diamond, the recording of scattered ions is performed by an annular detector, which decreases the statistical error and improves the measurement accuracy. The limit of impurity detection is 1014 at/cm2 for light impurities and 1012 at/cm2 for heavy impurities.
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Schedule a callMore From: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
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