Abstract
Ion scattering spectroscopy, which is a variation of low energy ion scattering (LEIS) that employs glancing scattering angles, is performed on InGaP(001) surfaces. LEIS energy distribution are simulated by computer simulation along the <110> and <ī10> direction, and the match of the positions of the flux peaks shows that the top three atomic layers are bulk-terminated. A newly observed feature are identified as a minimum in the multiple scattering when the ion beam incidence is along a low index direction. Calculated trajectories of scattered ions. This new method for analysis of large-angle LEIS data was shown to be useful for accurately investigating complex surface structures.
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