Abstract

Abstract The microwave surface resistance and reactance of YBa2Cu3O7 multilayers for MCMs have been studied as a function of thickness and relative permittivity of dielectric layers at 500 MHz and 10 GHz propagation frequency. Additionally, frequency properties of a YBCO/CeO2/SrTiO3/YBCO/LaAlO3 multilayer have been analyzed and results compared with measurement results. Performed simulations have shown that a dielectric layer of high relative permittivity, necessary for good isolation between superconducting ground planes and power planes in the multichip modules, has negligible influence on the effective surface resistance and reactance up to 0.5 μm dielectric thickness.

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