Abstract
SUMMARYDesorbed gases from an anode stimulated by electron irradiation are regarded as one of the causes of vacuum breakdown. To understand vacuum breakdown phenomena, it is important to analyze the composition and quantity of electron‐stimulated desorption gases. The single‐pulse electron beam irradiation method was developed for detailed analysis of desorbed gas characteristics. It is possible for this method to reduce the modification of surface conditions due to electron beam irradiation, and it makes it possible to measure the transitions of the gas desorption rate from the virgin surface state to a certain period. Using this method, we investigated the desorbed gases from an oxygen‐free copper electrode. It was found that electron irradiation caused H2 gas desorption from the copper electrode and produced conditioning of the gas desorption. A large amount of H2 gas was desorbed in the initial electron beam irradiation. By analysis of the gas desorbed by irradiation with a single‐pulse electron beam, it is possible to observe the change of the gas desorption rate from the virgin surface to a certain number of electron‐irradiated surface states. Detailed analysis of the gases desorbed from a sample can be used to evaluate the electrode material in a vacuum.
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