Abstract
We analyzed light intensity distributions in a subwavelength fluorescent film, which was excited by a focused electron beam. We have developed an analyzing method using Monte Carlo simulation and the finite-difference time-domain (FDTD) method. Electron scattering and trajectories were calculated by Monte Carlo simulation. Propagation and scattering of light excited with the electrons was calculated by FDTD method. A nanometric light spot was formed on the fluorescent film surface and its light intensity and its full width at half maximum (FWHM) were evaluated. We discuss the intensity and the FWHM dependence on the thickness of the fluorescent thin film and the acceleration voltage of an incident electron beam.
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