Abstract
a three-dimensional finite element model of a surface acoustic wave (SAW) delay line based hydrogen gas sensor on YX cut LiNbO3 substrate with a palladium film was developed and simulated using ANSYS platform. The changes of the output voltage were studied due to the exposure of the palladium film to hydrogen, and the effects of the elastic modulus and density changes of the Pd film were analyzed. The effects of the palladium film density decrease and elastic modulus decrease on the SAW hydrogen gas sensor are in opposite ways. The effect resulted from the elastic modulus decrease is more obvious. The impulse response analysis of the device was performed, from which the frequency response and hence a center frequency of about 100MHz was obtained.
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