Abstract
Due to the influence of the substrate, direct measurement of the hardness of thin films by standard micro-indentation tests is not always possible. In such situation, determination of the intrinsic film hardness requires the analysis of a set of experimental apparent hardness values obtained for different indentation loads. A number of mathematical equations based on various assumptions were proposed in literature for that purpose. Most of the models were established on the basis of standard Vickers indentation. Using these models to process the data obtained by Knoop indentation does not provide the same intrinsic hardness value, even after Knoop/Vickers standard conversion, than the one obtained from Vickers indentation. The same problem arises when processing the data coming from depth-sensing indentation. A method to obtain comparable hardness values is proposed in the present work by considering an “equivalent” Vickers hardness in the case of Knoop indentations and the corresponding Martens hardness for depth-sensing indentation. This method has been used to determine the intrinsic hardness of titanium nitride film.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
