Abstract
In the field of non-contact methodology for the evaluation of carrier transport study, microwave Hall mobility technique using bimodal cavity is the most sensitive method available so far. Though there is no constraint for the use of different types or shapes of the bimodal cavities used, each cavity would have its own advantages and disadvantages. In this respect, it is very important to analyze the sensitivity of different cavities that could be used in this methodology. In this paper, different bimodal cavities [TE112 (X-band) cylindrical and TE111 (P-band) cylindrical, TE101 (X-band) cubical and a rectangular bimodal cavity (X-band resonating with TE103 and TE105 modes)] are used to evaluate the carrier mobility in various semiconductor samples. These cavities are then analyzed in terms of the sensitivity and the percentage of deviation from the DC mobility values.
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