Analysis and Research on Modeling Methods of Mems Coupling Dynamic System of Ultrasonic Motor

Abstract

The ultrasonic motor is a complex dynamic system, which be divided into an electro-mechanical coupling system and a drive and control system. The core of the electro-mechanical coupling system lies in excitation of elliptical movement of the mass points on the surface of the stator and frictional transfer of the power and the movement. Modeling of the electro-mechanical coupling dynamic system of the ultrasonic motor substantially comprises two aspects. First, the dynamic system is viewed as an integral transfer function, and an intuitive relationship between input of the electric energy and output of the power is established. Second, geometric parameters and material parameters of mechanisms are closely correlated with dynamics of the mechanisms.