Abstract
A high performance and cost effective biosensor is designed based on a radial contour-mode disk resonator. Filling a dielectric material within the capacitive gap, we can achieve low motional resistance (Rx) in a cost-effective manner. The motional resistance of the new device is characterized analytically and validated using 3D-multiphysics simulation. Compared with other biosensors, the introduced biosensor may detect the smaller mass changes with mass sensitivity of −74.68μm2/ng (−1617Hz/ng).
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