A new high reliable structure of micro-electro-mechanical radial contour mode disk resonators for UHF application

Abstract

A new high reliable microelectromechanical radial contour mode disk resonator is demonstrated with the ability to work at UHF range and high quality factor in both vacuum and air. The hollow disk structure of resonator with a ring shape anchor makes it capable to work at higher frequencies without downscaling. The ring shape anchor, which is placed at the stress free nodal zone of resonator at the desired resonance mode, causes significantly low insertion loss and therefore high quality factor. Such an anchor seems to be more reliable than stem shape anchor reported at previous papers. The motional resistance of the resonator is decreased due to displacement of the electrodes in both inside and outside of the structure. In addition to providing simulation results, this paper formulates the resonance frequency and calculates the optimum location of the anchor. Transfer function, resonance frequency and anchor displacement versus inner radius are studied.