Analysis and design of a fourth-order ΣΔ ADC for MEMS digital gyroscope sensors

Abstract

This paper presents a fourth-order sigma-delta (ΣΔ) ADC applied to a micro-electro-mechanical system (MEMS) gyroscope system. First, a system-level model of ΣΔ modulator containing non-ideal factors is established, and the optimal system performance of the ΣΔ modulator is determined by optimizing the feedforward path and the feedback coefficient of the feedback path. Then, the operational transconductance amplifier (OTA) with chopping technique and clock timing to control bias current in the first stage integrator of the circuit design is able to reduce not only the flicker noise of the modulator, but also reduce the system power consumption. Third, the design of other essential circuit modules is presented, and the circuit performance meets the requirements and low-power consumption is achieved. The designed ΣΔ ADC uses a 0.18 μm CMOS BCD process, with a ΣΔ modulator area of 0.64 mm2 and a digital filter area of 2.03 mm2. When the sampling frequency is 2 MHz and the signal bandwidth is 7.8 kHz, the experimental measurement results show that the proposed ΣΔ modulator with the fourth-order CIFF structure can achieve a signal-to-noise ratio (SNR) of 66.3 dB and an effective number of bits (ENOB) of 10.07 bits, with a dynamic range (DR) of 89 dB and a power consumption of 9 mW. The SNR of ΣΔ ADC after filtering is 63 dB, which meets the requirements of high DR and low-power consumption of MEMS digital gyroscope sensors.