An Unstructured Finite-Volume Method for Structure–Electrostatics Interactions in MEMS

Abstract

Radio-frequency microelectromechanical systems (RF MEMS) are widely used for contact actuators and capacitive switches, and involve metal–dielectric contact. In these devices, the structure is activated by an electrostatic force, whose magnitude changes as the gap closes. It is advantageous to model fluid and structural mechanics and electrostatics within a single comprehensive numerical framework to facilitate coupling between them. In this article, we extend a cell-based finite-volume approach popularly used to simulate fluid flow to characterize structure–electrostatics interactions. The method employs fully implicit second-order finite-volume discretization of the integral conservation equations governing elastic solid mechanics and electrostatics, and uses arbitrary convex polyhedral meshes. Results are presented in this article for a fixed-fixed beam under electrostatic actuation.