Abstract

Organic thin film transistors (OTFTs) have made impressive progress over the past decade, and it appears increasingly likely that OTFTs will find use in a number of low-cost, large-area electronic applications, such as active-matrix displays, smart cards, price and inventory tags, and large-area sensor arrays. OTFTs provide two principal advantages over TFTs based on inorganic semiconductors: they can be fabricated at lower temperature and, potentially, at significantly lower cost. Low processing temperatures allow OTFT device and circuit fabrication on polymeric or other inexpensive substrates, rather than glass. The prospect of a flexible, rugged, lightweight active-matrix display at relatively low cost has spurred a number of manufacturers and government agencies to consider plastic displays for a variety of military, medical, industrial, and consumer applications. We report here on the design and fabrication of a flexible active-matrix OTFT backplane suitable for use in flexible polymer-dispersed liquid crystal displays. 75 /spl mu/m thick flexible polyethylene naphthalate (PEN) film was used as the substrate, and OTFT and pixel arrays with good electrical performance, yield, and uniformity were obtained.

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