Abstract
Acoustic wave devices have been applied for detecting chemical and physical phenomena in gas and liquid applications. For the surface acoustic wave sensors (SAW sensors), the mechanical waves propagating through a piezoelectric crystal include Rayleigh and shear modes. They are influenced by the shape and size of the metal electrodes interdigital transducers (IDTs). Traditionally, IDTs were fabricated in the form of long straight parallel fingers on the piezoelectric substrate. This paper presents a piezoelectric device with focused IDTs (FIDTs) placed on a Y–Z lithium niobate (LiNbO3) substrate to achieve Rayleigh wave energy convergence. The energy conservation principle, called the Rayleigh principle, is used to prove the effective performance of IDTs with concentric shape. Amplitude fields of the conventional and concentric structures are shown. In addition, the energy loss and the output signal changes are compared between the two cases.
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