Abstract
We propose a metal–insulator–metal (MIM) structure which consists of a [Formula: see text]-shaped resonator and a surface plasmon polariton (SPP) waveguide. The finite element method (FEM) is employed in the simulation. The results show that this structure forms an optical pressure sensor. The transmission spectra have a redshift with increasing pressure, and the relation between the wavelength shift and the pressure is linear. The nanoscale pressure sensor shows a high sensitivity and may have potential applications in biological and biomedical engineering.
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