Abstract
Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA) have been used to study the migration of H, Li, O, Ti and Nb during the early stages of Ti indiffusion in lithium niobate waveguides. The results indicate the formation of a Ti-O phase prior to the formation of Li-Ti-O and Nb-Ti-O. Hydrogen present as an impurity in the as-deposited Ti film diffuses into the bulk and assumes a similar depth distribution to the Ti dopant.
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