Abstract
The nanoscale deformation behavior of the solid solution Ti 0.5Al 0.5N thin film was systematically investigated by nanoindentation measurements. The effect of the tip radius of the indenter on the behavior of elastic–plastic deformation was also evaluated. The Hertzian stress analysis was used to determine the distribution of resolved shear stress at the initiate plastic deformation, and the obtained critical resolved shear stress was compared to the theoretical shear strength to establish correlations and differences. Comparison of the calculated critical shear stress and theoretical shear strength also indicated that new complete dislocation nucleation during nanoindentation was not the prerequisite of the onset of plastic deformation, even at very shallow indentation depth.
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