Abstract

With the increased requirement of miniaturization structures on hard and brittle substrates, micro abrasive air jet turning technology has become a promising machining technology for manufacturing miniaturization structures. This paper presents an investigation on multi-pass radial-mode micro abrasive air jet turning of fused silica. The effect of machining parameters on the depth of cut and materials removal rate was analyzed. The waviness and striation formation mechanisms were studied. It was found that increasing the number of passes significantly increases the depth of cut and materials removal rate. When the surface speed is reduced, the depth of cut and materials removal rate significantly increases. The waviness may be attributed to the intersection and overlap of the adjoint jet footprint. The crossed striations have been found, which may lead to the elimination of the striation. A predictive model of the material removal rate was developed using the dimensional analysis method. The model was assessed and shown to be able to give adequate predictions.

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