Abstract
A hybrid-type integrated photodetector which uses metal-semiconductor Schottky barrier diode incorporated in the partially metal-clad-dielectric-slab waveguide (PMC line) structure is proposed, analysed and experimentally studied. The PMC line serves not only as electrodes but also as a two-dimensionally confining structure for a guided optical wave. The wave is coupled from the PMC line into the depletion layer of the diode through a coupling layer and a thin metal film; this scheme avoids the reflection loss inherent to conventional detectors. The analysis indicates that the present photodetector using Si-Schottky barrier diode can be designed so that the quantum efficiency of 92% and cut-off frequency of 6.1 GHz are obtainable at 0.63 µm wavelength.
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