An integrated framework of Industry 3.5 and an empirical study of simulation-based automated material handling system for semiconductor manufacturing

Abstract

ABSTRACT Industry 4.0 empowered by the advanced technologies has driven digital transformation of global manufacturing networks for smart production. However, most of the industries may not be ready for direct migration. To fill up the gaps, this study aims to develop an integrated framework of Industry 3.5 as a phased migration towards Industry 4.0 while employing methodologies and technologies to show systematic approach for the existing manufacturing ecosystem. Moreover, an empirical study of automated material handling system (AMHS) for semiconductor manufacturing is conducted as validation, in which congestion of AMHS can be reduced by integrating machine learning, dispatching strategies, and simulation modelling. The empirical study has shown the practical viability of the proposed integrated framework of Industry 3.5 under the existing system and manufacturing environment.