Abstract

300 mm semiconductor factories require the combination of different types of AMHS (Automated Material Handling System) components from different suppliers for optimal AMHS solutions. To realize it, interoperable communication specification for AMHS is required. Selete (Semiconductor Leading Edge Technologies, Inc) has developed it by discussing with member companies of Selete and cooperative AMHS vendors about implementation level requirement specifications, and confirming its interoperability by evaluating actual behaviors of AMHS components in which the above mentioned specifications are implemented. This specification contributes to reduce the cost and time of the communication interface development in AMHS vendors and semiconductor manufacturers when AMHS components from two or more vendors are combined.

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