Abstract
In-the-lens spectrometers using the properties of an adiabatically decreasing magnetic field have demonstrated superior performance over a number of other detectors, particularly in terms of rejection of errors due to local field effects. Traditionally, however, this has involved placing the sample in a strong magnetic field which can have deleterious effects, particularly on imaging resolution. We present a design of spectrometer which uses adiabatic electron straightening to minimize local field errors but in which the sample is maintained in a region of low magnetic field strength. The design offers all the previous advantages but with imaging capabilities approaching those attainable with a conventional SEM at short working distance.
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