Abstract
A modified throughput method using a system with an extremely high vacuum (XHV) pump was developed to determine the outgassing rate of a vacuum chamber type sample accurately eliminating the contribution of outgassing from the vacuum gauge. The up-stream and down-stream sides of an orifice were connected with two sets of bridges, each of which consisted of one gauge head on a T-tube and two valves to terminate the tube. Hence the combination of the space being measured and the gauge was selected by the valve operation. A mass spectrometer was also set to the similar bridge to analyse the outgassing species. The outgassing rates of the total and the gauge were measured using the different valve combinations and the true outgassing rate of the sample was that of their difference. The outgassing rate of an electrolytically polished stainless steel chamber with TiN inner coating was determined at various temperatures after baking at 150 °C. Only hydrogen was then released at a specific rate at room temperature, of 7 × 10 −11 Pa·m·s −1, which was sufficiently low for use of the wall material in XHV equipment.
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