Abstract
This paper investigates an improved trench MOS barrier Schottky (TMBS) structure with extra double epitaxial layers (DE-TMBS) based on the conventional TMBS (C-TMBS) featuring a high-doped N-type current spreading layer (CSL) and a high-doped low resistance layer (LRL). Compared to the C-TMBS, the CSL in the improved structure is grown on the N-type drift region, and the LRL is extended on the CSL. According to the numerical simulations and analytical models, the specific on-resistance (Ron,sp) of DE-TMBS can be significantly reduced compared to the conventional one. This is primarily due to the high doping concentration in CSL, which effectively lowers both the JFET resistance and spreading resistance. Additionally, the increased doping concentration in LRL reduces the channel resistance and JFET resistance. Moreover, the doping concentration and thickness of CSL and LRL are optimized to maximize the figure of merit (FOM), that Ron,sp is reduced by 40.9 % and the FOM (BV2/Ron,sp) is improved by 67.9 % compared to the C-TMBS structure.
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