Abstract
This paper presents an implantable microsystem for tonometric blood pressure measurement in small animals. The microsystem consists of four major components: (1) a titanium base for supporting a pressure sensor and an interface chip, (2) a micromachined capacitive pressure sensor array, (3) a switched-capacitor interface chip, and (4) a titanium cap. A new micromachining fabrication process has been developed to create capacitive pressure transducers with a flat surface necessary for tonometric pressure measurement. An array of three capacitive sensors is used to increase signal output and improve stability. A custom-designed switched-capacitor CMOS interface circuit is used to measure changes in capacitance. In vitro calibration tests have been performed on the complete cuff using a silastic tube to mimic a pliable blood vessel. A sensitivity of 2 mV/mmHg @ 100 mmHg and a resolution of 0.5 mmHg (based on 1 mV RMS interface chip noise floor) has been obtained. The dimensions of the cuff system 10(L)×6.5(W)×3(H) mm3.
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