Abstract
Xenon plasma produced in the Kansai Rotamak has been used to generate about 66 W of extreme ultraviolet (EUV) radiation. The plasma in the Kansai Rotamak is produced using a rotating magnetic field (RMF) generated using a pair of 200 kHz/180 kW oscillators. The plasma can be sustained for a period of 5 ms limited only by the duration of applied RMF. The rotamak plasma discharge is electrodeless and its geometry is sufficiently simple to allow easy access to the emitted EUV radiation.
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