Abstract

Synchroton X-ray topography is used to study defects in (100) InP crystals doped with Sn, S and Zn to carrier concentrations ranging from 10 17 to 2 × 10 19 cm -3. Edge, screw and mixed dislocations having a Burgers vector 1 2 a [110] have been found. The lowest dislocation densities (<100 cm -2) have been observed in heavily doped samples, which however always showed growth striations.

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