Abstract
Outgassing of 85% Ti–15% Mo wire has been studied by a quadrupole mass spectrometer in a continuously pumped vacuum system. The mass spectral analysis of residual gases during degassing was investigated in the range of 500–1500 °C. The experiments showed that the dominant measured gases were different and separable into approximately three types in the temperature range. In measuring outgassing rates of hydrogen from the wire at various temperatures, the diffusion constants of H2 have been derived and fitted by D=5.2×10−4 exp(−10 900/RT) cm2/s. The present work showed that the outgassing of wires greatly depends on the surrounding atmosphere in which the process is carried out. To determine a proper vacuum condition for thermal treatment of the wires, the effect of H2 pressure (from 5×10−4 to 10−7 Torr) on the treatment of the wires has been observed. Storage of the wires in the laboratory atmosphere for 1 to 35 days showed that the evolution of H2 or total gases was not changed markedly.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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