Abstract
In this paper, we propose an inherent variable stiffness approach to suppress bounce of electrostatic actuator caused by the gap deviation which is unavoidable because of the micro-fabrication deviation, the tear and wear in the device life-cycle. The variable stiffness is realized through simple clamped-guided beam with large deformations. It have been demonstrated that for the 0.3 μm gap variation, the fluctuation of collision speed (from zero to 2.7cm/s) for the variable stiffness actuator is 62% less than that of constant stiffness counterpart (from zero to 7.18cm/s) under the dual pulse voltage actuation. Meanwhile, the driving voltage based on the variable stiffness spring is only 19.5% lower than that of the constant stiffness spring. The proposed variable stiffness approach may find ample application for extending the life-cycle.
Published Version
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