Abstract
Calibration measurements of linear dimensions in the range 0.1 to 100 μm are provided by a high-resolution, scanning electron microscope-scanning specimen stage system. Computer-controlled, with a stationary sem electron beam and interferometric measurement of stage position, the system can provide point-to-point measurements accurate to 0.01 μm. It also forms the basis for development and certification of calibrated standards for planar objects, particles, and other microscopic objects and features
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